Introduction to Microsystems

This course is a sequel to the Sensing and Actuation and intends to familiarize students with commercially available microsystems, i.e., mainly Micro-electro-mechanical systems (MEMS) based sensors and actuators. It will introduce students to the scaling effects in microsystems, which forms the foundations of MEMS. Preliminary modelling, design, fabrication, and material aspects of MEMS devices will be covered. Cases of studies will include commonly used MEMS transducers, such as pressure sensors, accelerometers, gyroscopes, microphones, speakers, ultrasonic transceiver, RF switches, RF filters, and RF couplers.

Module 1 introduces students to the idea of miniaturization, it's benefits, and how it has contributed to the technological advancements over past few decades. Fabrication of MEMS devices has hugely benefitted from the CMOS processes. Students will appreciate the impact of dimensional scaling in the IC industry on major micromachining processes that contributed the MEMS revolution.

In module 2, students will be exposed to the prominent MEMS transducers that are commercialized, their use cases and applications through case studies. Details of theoretical basis, multiphysics modelling and design of sensing/actuation elements will be discussed.

Module 3 is designed to provide insights on the role of scaling of physical laws in achieving desired functionality of microsystems. It builds on the modelling fundamentals covered in module 2.

Module 4 and 5 focuses on the two important aspects of realizing microsystems i.e., fabrication, system integration and packaging. The notion of multimodal sensing in the context of microsystems will be introduced.

The course is designed to enable the students to:

Understand

• The benefits of microsystems as compared to their macro counterparts.
• The key technology drivers for realization of microsystems.
• The working principle and physical laws relevant to the functioning of commercialized MEMS sensors.

Apply

• Modelling concepts for design of sensing/actuation elements in MEMS transducers.
• Knowledge of performance metrics to select suitable off-the-shelf MEMS transducers based on available specifications.

Analyze

• Application scenarios to choose suitable microsystems to leverage their unique benefits.
• Design constraints to perform engineering trade-off for optimal performance.

Synthesize 

• Signal transduction mechanisms based on available materials and permissible design rules for novel microsystems aimed at specific applications.
• Microsystems compliant with fabrication constraints.

• Micro and Smart Systems, Technology and Modeling, Ananthasuresh, GK et. al., John Wiley & Sons, Inc.
• Foundations of MEMS, Chang Liu, Prentice Hall
• Introductory MEMS, Thomas M Adams · Richard A Layton, Springer

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